Proceedings of JSPE Semestrial Meeting
2014 JSPE Spring Conference
Session ID : H76
Conference information

Host: The Japan Society for Precision Engineering

Profile measurement of an aspherical mirror by high by high-speed nanoprofiler
*Yusuke Tokuta, Takao Kitayama, Koji Usuki, Takuya Kojima, Kenya Okita, Kohei Okuda, Motohiro Nakano, Kazuya Yamamura, Ryota Kudo, Katsuyoshi Endo
Author information
Keywords: profiler, figure error, aspheric mirror, high accuracy mirror, repeatability
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (700K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2014 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top