Proceedings of JSPE Semestrial Meeting
2020 JSPE Spring Conference
Conference information

Host: The Japan Society for Precision Engineering

Name : 2020 JSPE Spring Conference

Location : [in Japanese]

Date : March 17, 2020 - March 19, 2020

Development of ozone/UV assisted dry polishing
Planarization of GaN substrate
*Akihisa Kubota
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Keywords: ozone, ultraviolet, polishing, GaN
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 141

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Abstract
[in Japanese]
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© 2020 The Japan Society for Precision Engineering
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