2020 JSPE Spring Conference
Conference information
Host: The Japan Society for Precision Engineering
Name : 2020 JSPE Spring Conference
Location : [in Japanese]
Date : March 17, 2020 - March 19, 2020
Examination of novel glass hole processing method using silver precipitates in glass and wet etching
*Hirofumi Kawamura, Souta Matsusaka, Kentaro Nomoto, Hiroki Kodaka, Hirofumi Hidai, Akira Chiba, Noboru Morita
Author information
Keywords:
Solid state ion exchange,
Silver precipitates,
Hydrogen fluoride,
Through glass via,
Wet etching,
Borosilicate glass
Pages 764-765
Details
