The study on 'Abrasive-Free Polishing of GaN Using Buffs'

Abstract

There are still challenges in the GaN manufacturing process in terms of cost, time, and environmental impact. In this study, we attempted experiments to determine whether processing could be performed using only the friction of a buff, without the use of abrasives. The results showed that removal processing is possible using a PVA buff. This presentation will provide a detailed report on these findings.