RADIOISOTOPES
Online ISSN : 1884-4111
Print ISSN : 0033-8303
ISSN-L : 0033-8303
3.3 Formation of thin films by low energy ion beam deposition
Siro NAGAI
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Keywords: ion beam deposition, thin film, diamond-like film, ultra-high purity metal, semiconductor, real-time surface analysis
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1995 Volume 44 Issue 9 Pages 667-672

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