RADIOISOTOPES
Online ISSN : 1884-4111
Print ISSN : 0033-8303
ISSN-L : 0033-8303
3.4 Ion beam etching
Akihisa YOSHIDA, Takashi HIRAO
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Keywords: ion beam etching, focused ion beam, gas cluster ion beam
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1995 Volume 44 Issue 9 Pages 673-676

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