SEISAN KENKYU
Online ISSN : 1881-2058
Print ISSN : 0037-105X
ISSN-L : 0037-105X
Research Flash
Design and Chartacterization of High-Torque Silicon Based Electrostatic Micromotors
Patrice MINOTTI, Philippe LANGLET, Gilles BOURBON, Philippe HELIN, Takahisa MASUZAWA, Hiroyuki FUJITA
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1999 Volume 51 Issue 8 Pages 644-646

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© 1999 Institute of Industrial Science The University of Tokyo
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