2013 Volume 65 Issue 6 Pages 831-834
The present report describes a reliable fabrication method of metal micro-electrodes embedded in polydimethylsiloxane (PDMS) using a dry peel-off process which is one of transfer techniques of metal layers to polymers. Two different surface modifications with self-assembled monolayers were carried out for easy and reliable transfer of Au micro-patterns to the PDMS;(1) perfluorodecyltrichlorosilane (FDTS) on silicon substrate for easy release of the Au patterns from the Si substrate, (2) (3-mercaptopropyl)trimethoxysilane (MPTMS) on the Au patterns to promote the adhesion between the Au patterns and PDMS. Moreover, we showed two different applications of Au micro-patterns in flexible PDMS, such as 1) the flat stamp for micro contact printing and 2) micro-heaters for local heating.