2005 年 56 巻 7 号 p. 409
Microgrooves were fabricated on aluminum surfaces using anodizing, laser irradiation, and electrochemical etching. Aluminum specimens covered with porous type oxide films were irradiated with a pulsed Nd-YAG laser in distilled water to remove the anodic oxide film. The electrochemical etching of the laser-irradiated specimen in NaCl solution caused the formation of grooves with rough surfaces, while the electrochemical etching in CH3COOH/HClO4 solution caused the formation of grooves with flat surfaces. The width and depth of the grooves increased with electrochemical etching time. Mesh-like micro-patterns with 70μm line width and 30μm line depth were fabricated on aluminum surfaces by consecutive processes of anodizing, laser irradiation, and electrochemical etching.