表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
研究論文
レーザー照射と電解エッチングを用いたアルミニウムの表面微細加工
菊地 竜也高橋 英明丸子 智弘
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2005 年 56 巻 7 号 p. 409

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Microgrooves were fabricated on aluminum surfaces using anodizing, laser irradiation, and electrochemical etching. Aluminum specimens covered with porous type oxide films were irradiated with a pulsed Nd-YAG laser in distilled water to remove the anodic oxide film. The electrochemical etching of the laser-irradiated specimen in NaCl solution caused the formation of grooves with rough surfaces, while the electrochemical etching in CH3COOH/HClO4 solution caused the formation of grooves with flat surfaces. The width and depth of the grooves increased with electrochemical etching time. Mesh-like micro-patterns with 70μm line width and 30μm line depth were fabricated on aluminum surfaces by consecutive processes of anodizing, laser irradiation, and electrochemical etching.

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© 2005 一般社団法人 表面技術協会
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