表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
研究論文
加熱触媒体上で生成した原子状水素を用いたプラスチック基板の表面処理
部家 彰松尾 直人
著者情報
ジャーナル フリー

2007 年 58 巻 12 号 p. 836

詳細
抄録

The surface properties of a plastic substrate were changed using a novel surface treatment called atomic hydrogen annealing (AHA). In this method, a plastic substrate was exposed to atomic hydrogen generated by cracking hydrogen molecules on heated tungsten wire. Surface roughness was increased, and O atoms and halogen elements (F and Cl) were selectively etched by AHA. The surface modification of the PEN substrate affects the surface property of the SiNx film. Adhesion between the SiNx film and the PEN substrate in the SiNx film/PEN substrate prepared by Cat-CVD shows excellent properties.

著者関連情報
© 2007 一般社団法人 表面技術協会
前の記事 次の記事
feedback
Top