2007 年 58 巻 12 号 p. 836
The surface properties of a plastic substrate were changed using a novel surface treatment called atomic hydrogen annealing (AHA). In this method, a plastic substrate was exposed to atomic hydrogen generated by cracking hydrogen molecules on heated tungsten wire. Surface roughness was increased, and O atoms and halogen elements (F and Cl) were selectively etched by AHA. The surface modification of the PEN substrate affects the surface property of the SiNx film. Adhesion between the SiNx film and the PEN substrate in the SiNx film/PEN substrate prepared by Cat-CVD shows excellent properties.