2012 年 63 巻 5 号 p. 323-
It is well known that bulk Pd-Ni-P metallic glass with a wide range of compositions (Pd: 25–60 at%; Ni: 20–57 at%; P 16–22 at%) can be prepared. In the present study, we investigated the method of production of electrodeposited Pd-Ni-P metallic glass films whose composition range is the same as that of bulk Pd-Ni-P metallic glass. The composition of electrodeposited Pd-Ni-P films were controlled by adjusting the concentrations of PdCl2, NiSO4·6H2O and H3PO3 in the Pd-Ni-P bath. X-ray diffraction patterns and transmission electron microscopy images showed that the electrodeposited Pd-Ni-P films were amorphous. The results of differential scanning calorimetry indicated that the electrodeposited Pd-Ni-P films were metallic glass with Pd, Ni, and P compositions of 36–57 at%, 25–43 at%, and 17–20 at%, respectively, which were almost identical to those in bulk Pd-Ni-P metallic glass. Furthermore, we succeeded in producing a Pd42Ni37P21 metallic glass film by electrodeposition. The alloy composition of this film was very similar to that of Pd40Ni40P20, which is one of the best bulk metallic glasses because of its glass forming ability (GFA).