表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
研究論文
マイクロ波プラズマCVDにより合成した窒化炭素の摩擦摩耗特性
~CVDダイヤモンドに対する摩擦摩耗~
田中 一平坂本 幸弘
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ジャーナル フリー

2015 年 66 巻 5 号 p. 219-223

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Carbon nitride, which has fascinating properties such as high hardness and high current density of field emission, was investigated to elucidate the tribological properties of carbon nitride synthesized using microwave plasma CVD against CVD diamond. Carbon nitride was synthesized using microwave plasma CVD with a mixture of CH4-N2 gas used as a reaction gas. The CH4 flow rate was varied from 1 to 3 SCCM. Using a ball-on-disk friction tester, tribological properties of the deposits were estimated. Counterpart materials were CVD diamond film coated onto the SiC ball using microwave plasma CVD. Regarding the estimation of tribological properties, the lowest coefficient of about 0.05 against diamond was obtained for deposits made with a CH4 flow rate 2 SCCM. The wear depth was shallow against deposits synthesized in a CH4 flow rate of 2 SCCM. Results demonstrate that tribological properties of carbon nitride against diamond had a low friction coefficient. Deposits synthesized in a CH4 flow rate of 2 SCCM exhibited the shallowest wear depth.

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© 2015 一般社団法人 表面技術協会
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