Improving the corrosion resistance of a thin aluminum film by surface treatment using 1, 2-Bis(triethoxysilyl)ethane(BTSE), Bis(triethoxysilyl)propyl)tetrasulfide(BTSPS), and Bis(trimethoxysilylpropyl)amine(BTSPA)was evaluated. A thin silane coupling layer of BTSE or BTSPS was formed on the film by immersion in a BTSE-ethanol or BTSPS-ethanol solution, thereby markedly improving both the general and pitting corrosion resistance of the film. The pitting potential shifts to the noble side. The quantity of the silane coupling molecule regarding BTSE or BTSPS increases markedly with the dipping time. These behaviors might be explained by the hard and soft acid-base(HSAB) principle. However, the corrosion resistance of the Al film immersed in BTSPA decreases because the formation of corrosion resistance deteriorates, producing a crude thick film. Clarifying the mechanism by which the corrosion-resistant improvement is affected by the silane coupling treatment requires elucidation of the chemical properties of the silane coupling layer: not only the silane coupling layer moldability based on the HSAB principle, but also the ion permeability.