ノート
無電解プロセスによるSiC基板上への貴金属触媒の析出
2020 年 71 巻 12 号 p. 839-841
詳細
2020 年 71 巻 12 号 p. 839-841
Catalyst modification on SiC substrates is a key technology for forming electrodes of power devices by electroless deposition. We deposited noble metals of five kinds on 4H-n-SiC substrates in a mixture solution of metal salt and HF under photoillumination. The metal particle nucleation and growth behavior differed considerably depending on the kind of metal.
