Journal of the Metal Finishing Society of Japan
Online ISSN : 1884-3395
Print ISSN : 0026-0614
ISSN-L : 0026-0614
Ion Implantation into Metals
Kazuo SAITO
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1988 Volume 39 Issue 10 Pages 563-570

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Abstract
Ion implantation is a unique technique for creating non-equilibrium phase surfaces or films, since atomic injection and atomic mixing can be effected at low temperatures without the restrictions of thermal diffusion or equilibrium phase diagrams. In this report we describe how ion implantation, including ion irradiation, can modify the microstructures of metals and synthesize specific structures such as metastable precipitates, amorphous phases, and quasicrystal phases. The application of ion implantation to surface and film modification to control the physical and chemical properties of the materials is also reviewd.
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© The Surface Finishing Society of Japan
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