高周波スパッタリングによるチタン-ニッケル合金皮膜の作製とその腐食挙動
1990 年 41 巻 1 号 p. 34-39
詳細
1990 年 41 巻 1 号 p. 34-39
One of the characteristics of amorphous alloy is its superior corrosion resistance. In this study, a Ti-Ni alloy film, which is known to be a material easily made amorphous, was prepared by RF sputtering on water-cooled glass substrate. The structure and corrosion behavior of the film were investigated, and the results obtained are as follows:
(1) Ti-Ni alloy films were confirmed to be uniform in composition throughout the entire thickness for all compositions of the films, and the level of impurities in the films was very low.
(2) Amorphous films were made at atomic percentage of from approximately 30 and 70% Ti, and superior corrosion resistance was observed when Ti content was >50 at.%.
(3) 54 and 68 at.% Ti-Ni amorphous films on glass substrates annealed at 500°C, which is above the crystallization temperature, showed crystallization, and corrosion resistance deteriorated somewhat in 96% H2SO4. When annealed at 200-400°C, which is below the crystallization temperature, no crystallization was observed and corrosion resistance increased slightly.
