表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
反応性イオンプレーティング法によって作製したNi-TiC複合皮膜の耐酸化性
石田 章武井 厚辻 裕一郎今井 八郎
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1992 年 43 巻 2 号 p. 126-130

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Cyclic oxidation tests of Ni-TiC composite and TiC films formed by reactive ion plating were carried out for ten -5h cycles at 300, 400, 500 and 600°C. The composite films exhibited good oxidation resistance relative to the TiC films. After oxidation the films were examined by X-ray diffraction, electron microprobe and Auger analyses. The results indicated that the good oxidation resistance of the Ni-TiC composite film at 300 and 400°C is attributable to a continuous, protective NiO layer formed on the surface of the film. As a result of this good oxidation resistance, the Ni-TiC films exhibited high hardness (Hv 1500) even after the oxidation tests, while the TiC films changed into titanium oxide with low hardness during the tests.
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