反応性イオンプレーティングによるTi(C,N)複合皮膜の形成について

抄録

This experiment was carried out with the aim of depositing composite films of Ti (C, N) by a reactive ion plating method. First, appropriate conditions for the depositing of TiN film were found and C₂H₂ gas was mixed with N₂ gas under the same conditions in an attempt to synthesize composite Ti (C, N) films. Even when C₂H₂ gas content was increased to 50%, there was little solution of carbon atoms into the TiN phase. An attempt was then made to synthesize composite Ti (C, N) films by mixing N₂ gas with C₂H₂ gas under conditions appropriate for the depositing of TiC films. It was found that the single phase of the solid solution film of Ti (C, N) was synthesized despite the increase in the ratio of N₂ gas, and that the color of the film became yellowish owing to the substitution between carbon and nitrogen atoms.