硬質皮膜特性のチャージ間の違いを評価するスクラッチ試験と残留応力測定に関する検討
1993 年 44 巻 11 号 p. 938-943
詳細
1993 年 44 巻 11 号 p. 938-943
Recently, TiN and TiC films formed by physical vapor deposition (PVD) and/or chemical vapor deposition (CVD) have been used to improve the wear resistance of cutting tools, dies, etc, but it has been claimed that films formed at different charges have different characteristics.
Accordingly, this study attempts an evaluation by means of scratch tests and residual stress measurement. Failure of TiN and TiC films under scratch testing was detected by an AE sensor and a bending load cell, and scratch traces were observed by SEM. The surface residual stress of the films was measured by X-ray technique method. The results showed that scratch tests and residual stress measurement are means of evaluating difference in the characteristics of TiN and TiC films.
