The Implantation of Si and Formation of Suicide by Molten Salt Electrochemical Process

Abstract

Electrochemical Implantation of Si and formation of suicide have been achieved at 450°C using the new electrolyte LiCl (54.5mol%)-KCl (40.5mol%)-LiF (5.0mol%), which contains K₂SiF₆ (0.05-0.07mol%). The electrode potential of Si (IV)/Si (0) (Si (IV) 0.06mol%) has been determined to be 1.6V vs. Li⁺/Li. When the iron and nickel electrodes were cathodically polarized to a more negative potential than 1.6V, silicon was implanted onto the surface of both of the electrodes. Powdered silicide was obtained when iron and silicon were codeposited on the iron electrode from the same electrolyte containing both K₂SiF₆ (0.05-0.07mol%) and Fe (II) ion (0.01-0.02mol%) for several hours.