1996 年 47 巻 5 号 p. 438-442
Diamond particles and films can be synthesized from the vapor phase using CVD, but thus far this has been subject to restrictions on substrate materials, substrate temperature, and synthesis conditions. It is especially difficult to synthesize diamond on Fe and Ni substrates because of the diffusion of carbon and other factors.
In this study, we investigated diamond synthesis on Fe-P and Ni-P alloy plated substrates from a methane-hydrogen reaction gas system using microwave plasma CVD. Deposits were characterized by SEM, XRD and Raman spectroscopy. High quality diamond deposits were recognized on the Fe-P substrates. On the Ni-P substrates, it was found that both deposition rate and nucliation density increased in comparison to Si substrate. Diamond synthesis was possible using plating substrates such as Fe-P and Ni-P alloy, which are thought to suppress the diffusion of carbon into the substrate.