表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
電子シャワー法によるFe4N膜の作製および鉄の窒化
李 松姫高野 昌樹鈴木 理之湯本 久美石原 正統
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1998 年 49 巻 10 号 p. 1095-1099

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Due to high Fe4N chemical stability, wear resistance, and Bs (saturation magnetic flux density), it shows promise as a magnetic recording medium. The many types of iron nitride, and their properties depend on their preparation. Iron nitrides were prepared by new PVD: electron shower. Nitriding increased with N2 gas pressure, and the Fe4N single phase was obtained at PN2=7×10-3 Torr. Bs was high……1.1T, but Hc (coercive force) low……30Oe.
To increase Hc due to shape anisotropy, Fe film was prepared by oblique evaporation, and nitrided by electron shower bombardment in PN2=0.01Torr for 420s. The iron film changed to iron nitride film (Fe4N+Fe2-3N), Bs was 0.75T and Hc was 500Oe. Which made the film applicable in magnetic recording media.

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