1998 年 49 巻 11 号 p. 1220-1226
Fabrication of fine pattern on an aluminum surface with pulsed YAG laser irradiation and subsequent nickel plating has been reported in two consecutive papers. The first paper studies anodic oxide film removal from aluminum by laser irradiation.
Aluminum specimens covered with porous anodic oxide films were irradiated with one YAG laser pulse in air and in Ni2+ ion solutions to examine the effect of laser power, P, defocusing distance, Δx, and irradiation atmosphere on the size of film removed area.
Anodic oxide films were thoroughly removed by laser irradiation at P>2mW in both air and a solution, when the specimen was placed near the focal plane of the laser beam. The size of film removed area increased with increasing P and showed a minimum on the focal plane (Δx=0), indicating 40-300μm diameter, larger in solution than in air.
Oxide film removal by laser irradiation is discussed, focusing on laser ablation of the metal substrate.