Fine-pattern coils were fabricated on an insulating board using anodizing, laser irradiation, nickel deposition, insulating board sticking, and aluminum substrate dissolution. Aluminum specimens covered with porous anodic oxide films were irradiated by a pulsed Nd-YAG laser through a beam splitter, iris diaphragm, convex lens, and quartz window in a nickel electroplating solution to remove anodic oxide film. During laser irradiation, the specimen was moved 3-dimensionally with an XYZ stage by a personal computer.
The width of the trench produced by film removal increased with increasing laser energy and with decreasing movement speed. After laser irradiation, nickel metal layer was electrodeposited at only the laser irradiated area by cathodic polarization. The specimen stuck on epoxy resin before dissolving the aluminum substrate. Fine pattern coils with nickel lines 15μm wide and at 25μm intervals were made on the insulating board.
