アークイオンプレーティング法によって形成した窒化物膜の硬度と密着力

抄録

The correlation between scratch adhesion and hardness has been investigated for nitride coatings deposited on metal substrates with various levels of hardness using arc ion plating. The intrinsic film hardness of TiN, CrN and (Ti_0.45 Al_0.55) N was separated from the composite hardness measured by micro Vickers tests using a model proposed by Ichimura et al. The critical load in the scratch test increases proportionally to the product of the scratch depth δcr and the composite hardness H_cr at the critical load. δ_cr for the same coating on non-nitriding substrates is almost constant. In addition to this result, δ_cr for coatings on nitrided steels was larger than that of coatings on substrates without nitriding. Both results suggest that δ_cr is an important parameter influenced by the intrinsic properties of deposited film and the true adhesion strength between the film and substrate.