表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
カソードルミネッセンス分光分析によるダイヤモンド中の結晶欠陥の評価
竹内 貞雄村川 正夫
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ジャーナル フリー

2001 年 52 巻 1 号 p. 120-124

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In the cathodoluminescence (CL) spectra of type II natural diamond and high-quality chemical-vapor-deposited diamond, both a free-exciton recombination radiation peak originating from high crystallinity (perfection of the crystal structure) and a band A peak originating from low crystallinity (imperfections in the crystal structure) are observed. In this study, a homoepitaxial diamond film has been synthesized on a single-crystal diamond (100) substrate using the combustion flame method and the film quality is evaluated by CL analysis. Crystal defects are mechanically introduced into the diamond film to study the change in the CL spectrum. Results indicated: 1) High-quality diamond with a negligible levels of nitrogen impurities and few crystal defects can be synthesized at a high rate (100μm/h) using the combustion flame method. 2) The band A peak corresponding to a crystal defect is broad around a wavelength of 430nm regardless of nitrogen impurities. 3) Mechanically introduced cracks (crystal defects) decrease the intensity of the FETO peak, while the intensity of the band A peak increases.

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