表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
高アスペクト比を有する電析Niマイクロプローブの試作
逢坂 哲彌淺富 士夫河南 賢横島 時彦門間 聰之本間 英夫
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2001 年 52 巻 1 号 p. 130-134

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The effects of organic additives in a Ni sulfamate bath were investigated in order to form microprobes with a high aspect ratio. Results without the usage of additives confirmed that Ni deposits have a low aspect ratio because of in-plain spread. With the addition of propargyl alcohol, however, the form of Ni deposit changes from a flat to an oval shape. The surface morphology improved with the addition of sodium salt of saccharin, but the probe shape was flattened. Finally, the addition of PEG-4000 to a bath containing propargyl alcohol and saccharin produced probes with a fine, smooth surface and a high aspect ratio. Thus, results confirmed that satisfactory probes could be obtained with Ni electrodeposition.

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