窒素イオンビーム照射したDLC膜の機械的特性

抄録

The effects of ion-energy values on mechanical properties, including frictional durability, nano-indentation hardness and micro-wear, of nitrogen-ion-beam irradiated DLC (Diamond-Like-Carbon) films at various energies have been investigated. These properties of the films were examined by means of the oscillating-type minute scratch test, and the nano-indentation test together with the micro-scratch test utilizing an atomic force microscope. The obtained results are summarized as follows: (1) The result obtained by the minute scratching test shows that the critical load at which film break out occurs tends to increase with ion-beam irradiation, that is, the frictional durability is improved. The degree of this improvement depends on the ion energy value, and the load increase with increasing ion energy. (2) The nano-indentation hardness of irradiated films does not show a remarkable difference in comparison with that of the film without irradiation under these irradiating conditions. (3) The result obtained by the micro-scratch test shows that micro-wear tends to decrease with ion-beam irradiation. The micro-wear depth depends on the ion energy value, and the depth decreases with increasing energy.