Synthesis of Microsphere by PCVD Method

Abstract

The synthesis of microspheres using tetraethoxysilane (TEOS) was investigated using a roundbottomed tubular reactor (150 mm ext. diam., 1150 mm hieght), which was capacitively coupled with a 13.56 MHz radio frequency generator. Under most experimental conditions, white dust particles were formed at the plasma zone, in the middle of the reactor, and deposited on the bottom of the reactor. SEM observation showed that 0.2 to 0.6 micron diameter microspheres were formed. The powder having different morphologies such as mono-dispersed, chained with several particles and coagulated, and was depended on the experimental conditions.