計測自動制御学会論文集
Online ISSN : 1883-8189
Print ISSN : 0453-4654
帯域通過型標本化定理を用いた白色光干渉による表面凹凸形状の高速測定
平林 晃小川 英光水谷 竜也永井 健北川 克一
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36 巻 (2000) 1 号 p. 16-25

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We devise a new method of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement. We introduce the concept of a characteristic function which is smoother than interference fringe (IF) and has a maximum at the same point as IF. We also show that IFs are band-pass signals, instead of low-pass signals. By using the sampling theorem for band-pass singals, an interpolation formula for the characteristic function is derived, which leads us to a fast surface profiling method. The number of sample points are reduced to 1/24 of that for the conventional method. Experimental results on a 9.947μm step height standard show that our method achieves the same level of accuracy as the conventional one.

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