抄録
We have developed a pneumatic servo table system, which is a precise positioning system using air power. This system has many advantages such as a high mass power ratio, a low heat generation and a low magnetic field generation. In this paper, the energy consumption of the pneumatic servo table system is investigated from simulations and experiments. To clarify the energy consumption, the air consumption must be examined. The air consumption of the system was analyzed theoretically and it became clear that the air consumption could be separated to the consumption for the movement of the table and that for the acceleration. The certainty of the analysis is confirmed with experimental results using a quick response laminar flow meter.
