Development of Pressure Differenciator Using Micro Fabricated Hot Wire Anemometer

Abstract

Some pneumatic systems require to measure the differentiated value of pressure with high resolution and high response. In former research, we have developed a pressure differentiator which is constituted of an isothermal chamber, a flow channels which make a laminar flow condition, pressure sensor and a diaphragm type differential pressure gauge. In this research, in order to reduce the number of the sensing elements and improve the resolution of the pressure differentiator while keeping the high dynamic characteristics, new pressure differentiator using micro fabricated hot wire anemometer is proposed and fabricated. Firstly, the principle of the new pressure differenctiator is discussed. Then, principle, fabrication process and characteristics of the micro hot wire anemometer. Finally, the results of performance tests are shown. The results indicate the high performance of the developed sensor.