Failure of DLC Films Caused by Cyclic Sphere Indentation and Effects of Film Structures on Failure Mode

Abstract

As a new strength evaluation method for hard coatings such as diamond-like carbon (DLC), the cyclic indentation test was proposed. Then, a test rig was fabricated and used for the evaluation of DLC. DLC and a Cr/C inclined interlayer for the improvement of the adhesion strength of DLC were prepared by the unbalanced magnetron (UBM) sputtering method on heat-treated and polished JIS SCM415 substrates. Si₃N₄ spheres having diameters of 10 mm were used for the cyclic indentation test. 10000 cycle indentations brought about DLC fracture and detachment in the indentation impression. Also ring cracks were observed around the impression. I(D)/I(G), which is the ratio of the D to G peak intensities, decreases towards the center of the impression. It was considered to indicate decreasing sp² cluster size in DLC. On the other hand, compressive stress increased near the surface of DLC in the contact area, as indicated by the change in its G peak position. It seemed to be the cause of the fracture and detachment of DLC in the impression.