Abstract of annual meeting of the Surface Science of Japan
Joint Symposium of the Surface Sience Society of Japan and the Vacuum Society of Japan
Session ID : 2Bp12
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Host: Abstract of annual meeting of the Surface Science of Japan

August18
High-k insulating films fabricated by thermal-ALD and PE-ALD
*TOSHIHIDE NABATAME
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[in Japanese]
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© 2017 The Surface Science Society of Japan
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