Tetsu-to-Hagane
Online ISSN : 1883-2954
Print ISSN : 0021-1575
ISSN-L : 0021-1575
Oxygen in Silicon
Naohisa INOUE, Kazumi WADA
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Keywords: silicon crystal, oxygen, LSI, CZ method, solubility, diffusion, precipitaes, growth, nucleation, time-lag heat treatment, warpage, hardening, gettering
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1987 Volume 73 Issue 8 Pages 947-955

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