Tetsu-to-Hagane
Online ISSN : 1883-2954
Print ISSN : 0021-1575
ISSN-L : 0021-1575
Micromachining
Hiroyuki FUJITA
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Keywords: micromachining, micro actuator, micro electro mechanical systems, MEMS, micromachine
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1992 Volume 78 Issue 2 Pages 195-199

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