TRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES
Online ISSN : 2189-4205
Print ISSN : 0549-3811
ISSN-L : 0549-3811
 
Oxygen Recombination Coefficient on Catalytic Surfaces in Ar-O2 Inductively Coupled Plasma by Actinometry
Masahito MIZUNOKiyomichi ISHIDATakeshi ITOTakuji KUROTAKITakashi MATSUZAKI
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2006 Volume 49 Issue 163 Pages 49-54

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Abstract

Atomic oxygen wall recombination coefficients at a high-temperature regime, more than 1300 K, and in a low static pressure environment are measured using the actinometric method for SiC, highly catalytic and SiO2 materials. For this purpose, the inductively coupled plasma of O2 with argon, as an actinometer, is employed. Measured values are compared with the numerical prediction obtained using the Kurotaki model. Agreement with the Kurotaki model is reasonable at least qualitatively.

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© 2006 The Japan Society for Aeronautical and Space Sciences
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