Photocatalytic Patterning using Nano-Colloidal Anatase in Aqueous Solution Process

抄録

Water-soluble titanium complexes were synthesized starting from TiCl₄ as a source of Ti. TiO₂ was prepared by hydrothermal treatment of the obtained Ti-malate complex. The TiO₂ sample was characterized by X-ray diffraction (XRD), X-ray fluorescence analysis (XRF), Transmission electron microscopy (TEM), UV-Visible spectroscopy. The sample consisted of ～10 nm mono-dispersed anatase particles. A blue shift of absorption due to quantum size effect in the nanoscale anatase particles was observed. Transparent stable colloid suspension was obtained by dispersing the prepared nano-sized anatase into water. For the photocatalytic patterning, Ti-glycolate complex was added into the colloid solution and this resulted solution was coated on a glass substrate. After drying, the film was covered by a photomask and irradiated by UV light. The irradiated part became insoluble due to the photocatalytic reaction promoted by anatase particles. The film of masked part was removed by washing with water, and patterned film was fabricated.