Regular Papers
Preparation and evaluation of LiMn2O4 films prepared by sputtering method
2013 年 38 巻 2 号 p. 225-227
詳細
2013 年 38 巻 2 号 p. 225-227
The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. In this research, we have prepared films by varying sputtering parameters. The dependence of film thickness on the sputtering parameters was evaluated. The relationship between film thickness and sputtering parameters was clarified. The film composition was identified by X-ray diffraction and gravimetric method. The surface morphology was observed by a scanning electron microscopy.
