Thermal Conductivity Evaluation of Polymer Thin Film

抄録

Thermal conductivity is a basic property in material manufacture. Materials show unique physical properties by making it thin. It is expected that the character of a thin film completely differs from that of the bulk. In order to evaluate the thermal conductivity of thin film, we have developed "Thermal Conductivity meter in thin film at Nano scale by 2ω method; TCN-2ω". In this study, we report the result of thermal conductivity evaluation of polymeric thin film measured by using TCN-2ω. With increasing the values of the thin film thickness, those values of thermal resistance (the reciprocal of thermal conductivity) are increasing, too. When the values of the thin film thickness have the range from 100 to 200 nm, the values of thermal conductivity of PI were about 0.3 W m^-1 K^-1.