日本機械学会論文集
Online ISSN : 2187-9761
ISSN-L : 2187-9761
生産加工・工作機械の規範2014
マイクロレンズアレイを用いた表面プラズモン共鳴による膜厚分布測定
兼岡 良樹坂下 竜一水谷 康弘岩田 哲郎
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2015 年 81 巻 832 号 p. 15-00291

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In order to measure the two-dimensional distribution of the thickness of a metal layer coated on a dielectric layer at a time, we propose to use a micro-lens array (MLA), instead of a conventional single plano-convex lens, by which lots of surface-plasmon-resonance (SPR) dip patterns could be observed from a modified Otto configuration. The individual micro lenses produce circular ring-shaped SPR dip patterns in reflection, which enable us to estimate the thickness of the metal with high sensitivity and precision with ease. A spatial resolution is determined by the size of each lens and is 300 μm in diameter. As a proof-of the principle experiment, we measured the thickness of a 50nm-thickness Au film with precision ±0.9 nm for an area of 2.7 mm×2.7 mm. A method for improving the spatial resolution further is discussed.

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