Peening is the process which is able to be generated compressive residual stress and is known to be effective for preventing SCC initiation and improvement of fatigue strength. Laser peening is used for the nuclear power plant components in order to prevent SCC initiation. Although it is reported that the compressive residual stress decreases due to applied stresses under general operating condition, the change of residual stress might be large under excessive loading such as an earthquake. The objectives of this study are to evaluate the relaxation behavior of the compressive residual stress due to laser peening and to confirm the surface residual stress after loading. Therefore laser peened round bar test specimens of SUS316L which is used for the reactor internals of nuclear power plant were loaded at room temperature and elevated temperature and then surface residual stresses were measured by X-ray diffraction method. In the results of this test, it was confirmed that the compressive residual stress remained after applying uniform stress larger than 0.2 % proof stress, and the effect of cyclic loading on the residual stress was small. The effect of applying compressive stress on the residual stress relaxation was confirmed to be less than that of applying tensile stress. Plastic deformation through a whole cross section causes the change in the residual stress distribution. As a result, the surface compressive residual stress is released. It was shown that the effect of specimen size on residual stress relaxation and the residual stress relaxation behavior in the stress concentration region can be explained by assumed stress relaxation mechanism.