2017 年 83 巻 854 号 p. 17-00278
Non-contact supports involving air or magnetic forces are used as guide supports for linear motion mechanisms. In the present study, non-contact supports are generated using the effect of the static pressure force produced by a squeezed air film. The linear slider is supported at just two of its ends. Applying a different excitation amplitude to the two transducers leads to a difference in the floating height at either end of the slider due to the different air-film thicknesses. This causes the slider to tilt, which produces a propulsion force due to the dead load. An experimental apparatus with a flat plate slider was developed and its floating characteristics were examined. In addition, the propulsion force was measured for sliders with different weights. The results indicated that the floating height was 2 to 3 times the excitation amplitude. The slider was capable of travelling all over the movement stroke. The traveling force increased with increasing slider weight, and was about 0.15-0.35 mN. The measurement results were in good agreement with theoretical calculations. Thus, the present study showed that the slider could be successfully supported in a non-contact state and was capable of movement under the influence of a propulsion force generated only by the dead load.