ta-CNx膜の摩擦摩耗特性に及ぼす膜中又は摩擦相手材タンタルの影響

抄録

In order to clarify the effect of Ta (tantalum) content on the friction and wear characteristics of the ta-CNx (tetrahedral amorphous carbon nitride) coating, an IBA-FAD (Ion Beam Assisted Filtered Arc Deposition method) was applied to generate hard carbonaceous coating to achieve low friction coefficient in ambient air. Following research works clarified that Ta containing carbon nitride (CNx:Ta) showed friction coefficient lower than 0.05 in ambient air, however, the coating only had around 10 GPa hardness which was assumed to be soft in industrial fields. To confirm Ta containing to the ta-CNx coating on friction and wear properties, ta-CNx:Ta coating was synthesized by IBA-FAD and an arc plasma gun which supplied different amount of Ta by using pulse discharge technique (100 or 200 pulse/min.). The hardness of ta-CNx was approximately 54 GPa, then the hardness of Ta containing ta-CNx became softer than ta-CNx such as approximately 33 GPa (ta-CNx:Ta200). After the ball-on-disk friction test between those coatings and SUJ2 disk, a specific wear rate of those coatings did not along with its hardness. From the XPS (x-ray photoelectron spectroscopy) analysis, oxygen/carbon ratio of the topmost coating surface decreased by containing Ta. Those results implied that Ta in the coating may have a possibility to prevent oxidation of carbonaceous coating. The friction coefficient of ta-CNx, ta-CNx:Ta100 and ta-CNx:Ta200 showed around 0.15 during friction test. To confirm the importance of Ta transformed layer on low friction property, friction test between ta-CNx coating and thin Ta coated SUJ2 disk was conducted. The friction coefficient of the pair became the lowest among them which value was approximately 0.08.