JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS
Online ISSN : 2189-9967
Print ISSN : 0915-1168
ISSN-L : 0915-1168
Special Issue on State-of-the-Art Technology of Chemical Mechanical Polishing
Prologue to the Special Issue on “State-of-the-Art Technology of Chemical Mechanical Polishing”
Momoji KUBO
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2014 Volume 59 Issue 12 Pages 736

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© 2014 Japanese Society of Tribologists
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