1990 年 14 巻 49 号 p. 13-18
A 3-D measurement device using slit-ray projection has been developed, which measures the accurate range and luminance data at a high speed. The device consists of a laser light source, a polygon mirror. an f-θ lens. PSD (position sensitive device), and parallel signal processing unit with 32bit MPUs. This device can obtain the range and luminance data in 1.1ms by 1.000 points simultaneously. The measurement resolusion is 50μm in along the X and Y axes and 25μm along in Z axis. This device has been applied to an inspection system for electronic components mounted on a PCB. The system can detect missing, shifted components and lack of solder.