テレビジョン学会技術報告
Online ISSN : 2433-0914
Print ISSN : 0386-4227
スパッタ法によるCdS : CdTeヘテロ接合X線イメージセンサー
富田 康弘高林 敏雄永田 幹夫河合 敏昭畑中 義式
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研究報告書・技術報告書 フリー

1990 年 14 巻 74 号 p. 1-6

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The CdS/CdTe heterojunction devices have been fabricated for the first time by RF sputter deposition and used as X-ray imaging sensor. The sputter-deposited CdS/CdTe heterojunction sensor showed a good diode characteristic, and high X-ray sensitivity. As an application of this sensor, a one inch X-ray vidicon (imaging pick-up tube) with photoconductive target consisting of CdS/CdTe heterojunction have been developed. It was observed that the X-ray signal current was about 130 nA/cm^2 for 13 R/min, is higher than 60 nA/cm^2 of our conventional PbO X-ray target.

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© 1990 一般社団法人映像情報メディア学会
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