1992 年 16 巻 76 号 p. 13-18
The green-emitting ZnS:TbOF phosphors were fabricated by sputtering a novel doubly-layered pressed target. This newly proposed target was found to be capable of avoiding the particle contamination. A systematic study on phosphor film preparation conditions was also made to improve the performance of green-emitting ZnS:TbOF TFEL devices. A developed device in this work typically shows the luminance exceeding 120 cd/m^2 at V_<th> +30 V with a frequency of 60 Hz.