1993 年 17 巻 22 号 p. 1-6
We have developed a direct X-ray detection system using a charge-coupled device (CCD) to work in a photon counting mode. It can obtain an X-ray spectrum at low X-ray intensity level while it can obtain an X-ray energy flux for each pixel at high X-ray intensity level. Its energy resolution is as good as that of the solid-state detector while its position resolution is as good as that of the micro-channel plate. Using an appropriate X-ray focusing system, we can simultaneously obtain X-ray images at various X-ray energies. Therefore, we can get material distributions in the image with picking-up characteristic X-rays.