MAGNETIC ANISOTROPY IN MAGNETRON IN-LINE SPUTTERED COBALT-ALLOY THIN FIKM DISKS

抄録

Magnetic anisotropy in magnetron in-line sputter deposited Co-alloy thin film disks was studied. The amount of dispersion in magnetic properties determined by using a transfer curve magnetometer was 85 Oe in film coercivity, 0.15 emu/cm^2 in remanenee-thiekness product, and 0.03 in coercivity squareness within a disk. Angular variation in magnetic properties showed a sinusoidal curve with two maxima and minima, corresponding to two regions which are parallel and normal to the pallet movement, respectively. The micro-structural examination revealed Co-alloy grains locally elongated in the direction of pallet movement. It was shown from the present study that approximately 45 % of Co-alloy grains on Cr-underlayer have in-plane c-axis and the resultant c-axis vector component of grains orients to the texture groove direction.